Methods for mixed acid cleaning of showerhead electrodes

ABSTRACT

In one embodiment, a method for cleaning a showerhead electrode my include sealing a showerhead electrode within a cleaning assembly such that a first cleaning volume is formed on a first side of the showerhead electrode and a second cleaning volume is formed on a second side of the showerhead electrode. An acidic solution can be loaded into the first cleaning volume on the first side of the showerhead electrode. The first cleaning volume on the first side of the showerhead electrode can be pressurized such that at least a portion of the acidic solution flows through one or more of the plurality of gas passages of the showerhead electrode. An amount of purified water can be propelled through the second cleaning volume on the second side of the showerhead electrode, and into contact with the second side of the showerhead electrode.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims the benefit of U.S. Provisional Application No.61/553,404 filed Oct. 31, 2011, entitled “FORCED-FLOW ELECTRODE ETCHUSING PNEUMATIC CYLINDER IN HORIZONTAL POSITION FOR SEALING,” and U.S.Provisional Application No. 61/553,416 filed Oct. 31, 2011, entitled“FORCED-FLOW ELECTRODE ETCH USING PNEUMATIC CYLINDER IN VERTICALPOSITION FOR SEALING.”

This application is related to U.S. application Ser. No. 13/483,566filed May 30, 2012 entitled “MIXED ACID CLEANING ASSEMBLIES,” which hasnow been patented and published as U.S. Pat. No. 9,293,305.

TECHNICAL FIELD

The present specification generally relates to mixed acid cleaningassemblies, more specifically, to mixed acid cleaning assemblies forcleaning showerhead electrodes.

BACKGROUND

The present disclosure relates generally to mixed acid assemblies forcleaning the gas passages of showerhead electrodes that are used asexcitation electrodes in plasma processing systems. Although the contextof the present disclosure is not limited to particular types ofshowerhead electrodes or the context in which the showerhead electrodesto be cleaned have been used, for the purposes of illustration, themixed acid assemblies are illustrated herein with reference to a monosilicon-based electrode having a disc-shape with concentrically arrangedgas passages. Those practicing the embodiments described herein willfind that some of the mixed acid assemblies proposed herein will enjoyfavorable utility in the context of a variety of types of electrodes andnon-electrodes.

FIG. 1 illustrates a mixed acid assembly coupled to a showerheadelectrode having a disc-shape. FIG. 3 illustrates a showerhead electrodein an exploded view. Further teachings regarding the structure ofshowerhead electrodes and electrode assemblies similar to thatillustrated in FIGS. 1 and 3 can be found in US Pub. Nos. 2007/0068629,2007/0235660, and 2007/0284246, pertinent portions of which areincorporated herein by reference. Additional related teachings can befound in U.S. Pat. Nos. 6,073,577, 6,148,765, 6,194,322, 6,245,192, and6,376,385, and US Pub. No. 2005/0241765.

SUMMARY

In one embodiment, a method for cleaning a showerhead electrode myinclude sealing a showerhead electrode within a cleaning assembly suchthat a first cleaning volume is formed on a first side of the showerheadelectrode and a second cleaning volume is formed on a second side of theshowerhead electrode. The showerhead electrode may include a pluralityof gas passages that extend through the showerhead electrode from thefirst side of the showerhead electrode to the second side of theshowerhead electrode. An acidic solution can be loaded into the firstcleaning volume on the first side of the showerhead electrode. The firstcleaning volume on the first side of the showerhead electrode can bepressurized such that at least a portion of the acidic solution flowsthrough one or more of the plurality of gas passages of the showerheadelectrode. An amount of purified water can be propelled through thesecond cleaning volume on the second side of the showerhead electrode,and into contact with the second side of the showerhead electrode.

In another embodiment, a method for cleaning a showerhead electrode mayinclude sealing a showerhead electrode within a cleaning assembly suchthat a first cleaning volume is formed on a first side of the showerheadelectrode and a second cleaning volume is formed on a second side of theshowerhead electrode. The showerhead electrode may include a pluralityof gas passages that extend through the showerhead electrode from thefirst side of the showerhead electrode to the second side of theshowerhead electrode. An acidic solution can be loaded into the firstcleaning volume on the first side of the showerhead electrode. The firstcleaning volume on the first side of the showerhead electrode can bepressurized with a gas supplied with a gas dispersion member. At least aportion of the acidic solution can flow through one or more of theplurality of gas passages of the showerhead electrode. The gasdispersion member may include a chamfered body having a substantiallytrapezoidally shaped cross-section and a plurality of gas outlets formedin the chamfered body. A quantity of purified water can be propelledthrough the first cleaning volume on the first side of the showerheadelectrode and into contact with the first side of the showerheadelectrode with a liquid dispersion member. The liquid dispersion membercan include a cylindrical body with a central flow path formed therein,and a plurality of liquid outlets formed in the cylindrical body. Eachof the plurality of liquid outlets can be a substantially linear conduitthat travels radially outward from the central flow path. An amount ofpurified water can be propelled through the second cleaning volume onthe second side of the showerhead electrode, and into contact with thesecond side of the showerhead electrode with a conoidal spray member.The conoidal spray member may include a cone shaped member having a basethat is relatively large compared to a peak of the cone shaped member,and a plurality of apertures formed through the cone shaped member andarranged in a plurality of concentric rings.

BRIEF DESCRIPTION OF THE DRAWINGS

The following detailed description of specific embodiments of thepresent disclosure can be best understood when read in conjunction withthe following drawings, where like structure is indicated with likereference numerals and in which:

FIG. 1 schematically depicts a mixed acid cleaning assembly according toone or more embodiments shown and described herein;

FIG. 2 schematically depicts a cross-section of a mixed acid cleaningassembly according to one or more embodiments shown and describedherein;

FIG. 3 schematically depicts an exploded view of a mixed acid assemblyaccording to one or more embodiments shown and described herein;

FIG. 4 schematically depicts a mixed acid cleaning assembly according toone or more embodiments shown and described herein;

FIG. 5 schematically depicts a conoidal spray member according to one ormore embodiments shown and described herein;

FIGS. 6A-6B schematically depict a gas dispersion member according toone or more embodiments shown and described herein;

FIGS. 7A-7B schematically depict a liquid dispersion member according toone or more embodiments shown and described herein;

FIGS. 8-9 schematically depict a mixed acid cleaning assembly accordingto one or more embodiments shown and described herein;

FIG. 10 schematically depict a cross section view of a clamping fork anda flange member of a mixed acid cleaning assembly according to one ormore embodiments shown and described herein; and

FIG. 11 schematically depicts a method for mixed acid cleaning accordingto one or more embodiments shown and described herein.

DETAILED DESCRIPTION

As is noted above, the present disclosure relates to a cleaning assemblywhich may be utilized to clean after initial manufacture and/orrefurbish electrodes such as, but not limited to, silicon-basedelectrodes. The concepts of the present disclosure should not be limitedto particular electrodes or electrode assembly configurations. Thus,electrodes, inner and outer electrodes of multi-component electrodeassemblies may be cleaned or refurbished with the embodiments describedherein. Moreover, electrodes with backing plates adhered to a siliconbased portion of the electrode may be cleaned or refurbished asdescribed herein.

Referring to FIG. 1, a cleaning assembly 100 comprises a modularelectrode sealing housing 10 for at least partially enclosing ashowerhead electrode 110. The modular electrode sealing housing 10 canbe located within a sealable chamber 102 that defines an interior volume104 that surrounds the modular electrode sealing housing 10. The ambientconditions of the interior volume 104 of the sealable chamber 102 can beisolated such that any gases that escape from the modular electrodesealing housing 10 during normal operation. Specifically, the sealablechamber 102 can be in fluid communication with an air inlet 106 thatsupplies air that is substantially free of caustic gases and an airoutlet 108 that is operable to remove any gases that escape from themodular electrode sealing housing 10. It is noted that the phrase “fluidcommunication,” as used herein, means the exchange of fluid from oneobject to another object, which may include, for example, the flow ofcompressible and incompressible fluids.

Referring now to FIG. 2, the modular electrode sealing housing 10comprises a high pressure closure member 20 that contains a firstcleaning volume 22. Specifically, the first cleaning volume 22 can be abore formed in the high pressure closure member 20. The first cleaningvolume 22 can be delimited by a depth defining wall 24 formed within thehigh pressure closure member 20. In some embodiments, the first cleaningvolume 22 can include multiple sections that each has a different outerboundary. Specifically, the first cleaning volume 22 can include a firstsection 26 and a second section 28. The first section 26 of the firstcleaning volume 22 can be delimited by a first outer wall 30. Similarly,the second section 28 of the first cleaning volume 22 can be delimitedby a second outer wall 32. In the embodiment depicted in FIG. 2, each ofthe first section 26 and the second section 28 can enclose a differentquantity of space. Specifically, the first section 26 can enclose arelatively small amount of space compared to the second section 28.Accordingly, a overlap defining wall 34 can be formed in the transitionbetween the first outer wall 30 and the second outer wall 32 that areformed in the high pressure closure member 20. It is noted that, whilethe first section 26 and the second section 28 of the first cleaningvolume 22 are depicted as being substantially cylindrical, can be thefirst section 26 and the second section 28 of the first cleaning volume22 can be any shape that is suitable to correspond with the portion ofthe showerhead electrode 110 that is desired to be cleaned.

Referring now to FIG. 3, the showerhead electrode 110 is commonlyutilized to process substrates in a plasma processing device. Theshowerhead electrode 110 can be a single-piece, circular showerhead or aportion of a multi-component, circular showerhead which can include acircular central electrode and one or more peripheral electrodesarranged about the circumference of the central electrode. Theshowerhead electrode 110 comprises a first side 112 and a second side114 with a plurality of gas passages 116 that are formed through theshowerhead electrode 110 and travel from the first side 112 to thesecond side 114. The showerhead electrode can be formed from materialcomprising or consisting of silicon (e.g., single crystal silicon orpolysilicon), silicon nitride, silicon carbide, boron carbide, aluminumnitride, aluminum oxide, or combinations thereof.

The modular electrode sealing housing 10 comprises a low pressureclosure member 40 that contains a second cleaning volume 42.Specifically, the low pressure closure member 40 forms at least aportion of the outer boundary of the second cleaning volume 42. In someembodiments, the low pressure closure member 40 can comprise aperipheral support region 44, a fluid collecting surface 46, and one ormore protruding support members 48 that cooperate to form at least aportion of the outer boundary of the second cleaning volume 42.

The peripheral support region 44 is formed around the fluid collectingsurface 46 and the one or more protruding support members 48. The lowpressure closure member 40 can be formed such that the peripheralsupport region 44 is raised with respect to the fluid collecting surface46. Thus, the fluid collecting surface 46 can be indented with respectto the peripheral support region 44. In some embodiments, an outletpassage 50 can be in fluid communication with the second cleaning volume42. In further embodiments, outlet passage 50 can be formed through thefluid collecting surface 46 of the low pressure closure member 40 suchthat the outlet passage 50 is substantially centered along the fluidcollecting surface 46.

The one or more protruding support members 48 can project away from thefluid collecting surface 46 such that the one or more protruding supportmembers 48 are raised with respect to the fluid collecting surface 46(e.g., offset with respect to the Y-axis). Thus, the one or moreprotruding support members 48 and the peripheral support region 44 cancooperate to define a sunken region formed into the low pressure closuremember 40. Accordingly, a portion of the second cleaning volume 42 canbe defined by the sunken region bounded by the peripheral support region44, the fluid collecting surface 46, and the one or more protrudingsupport members 48 of the low pressure closure member 40. Thus, thesecond cleaning volume 42 can be configured to operate as a basin thatcollects fluid during the cleaning process for removal via the outletpassage 50.

In some embodiments, each of the one or more protruding support members48 can extend from the peripheral support region 44 towards the centerof the low pressure closure member 40. Specifically, the embodimentdepicted in FIG. 3, includes four of the one or more protruding supportmembers 48 arranged such that each of the one or more protruding supportmembers 48 form a branch in a substantially “X” shaped pattern. Theperipheral support region 44 and the one or more protruding supportmembers 48 can form an upper support surface 52. The upper supportsurface 52 can be a substantially planar surface (e.g., depicted as anX-Z plane in FIG. 3) that is configured to resist deflection such asalong the Y-direction. It is noted that, while the one or moreprotruding support members 48 are depicted in FIG. 3 as beingsubstantially linear extrusions, the one or more protruding supportmembers 48 can be any shape suitable to support a showerhead electrode110 during operation of the cleaning assembly 100 such as, but notlimited to, substantially arcuate members. Moreover, the embodimentsdescribed herein can include any number of the one or more protrudingsupport members 48 suitable to support a showerhead electrode 110 duringoperation of the cleaning assembly 100.

Referring still to FIG. 3, the modular electrode sealing housing 10 cancomprise an electrode carrier plate 60 that is configured to support theshowerhead electrode 110 while in contact with the low pressure closuremember 40. The electrode carrier plate 60 comprises a peripheralelectrode contacting portion 62, one or more horizontal support members64, and an annular electrode contacting ridge 66. The peripheralelectrode contacting portion 62 can be formed around the one or morehorizontal support members 64 and the annular electrode contacting ridge66. Specifically, in the embodiment depicted in FIG. 3, the peripheralelectrode contacting portion 62 is substantially annular shaped sectionthat forms a support surface 68 that is configured to contact acorresponding portion of the showerhead electrode 110.

Each of the one or more horizontal support members 64 extends from theannular electrode contacting ridge 66 to the peripheral electrodecontacting portion 62. For example, the one or more horizontal supportmembers 64 can provide a structural link that supports the annularelectrode contacting ridge 66. Each of the one or more horizontalsupport members 64 is indented with respect to the peripheral electrodecontacting portion 62. Specifically, each of the one or more horizontalsupport members 64 form a relief with respect to the support surface 68of the peripheral electrode contacting portion 62 along the Y-axis. Eachof the one or more horizontal support members 64 can be coupled to anarcuate electrode contacting ridge 70 that projects away from the one ormore horizontal support members 64. In some embodiments, the arcuateelectrode contacting ridge 70 can extend away from the one or morehorizontal support members 64 such that the arcuate electrode contactingridge 70 has a portion that is on plane with the support surface 68 ofthe peripheral electrode contacting portion 62 (depicted in FIG. 3 as anX-Z plane).

In some embodiments, the annular electrode contacting ridge 66 can beformed around a central orifice 72. Alternatively or additionally, theperipheral electrode contacting portion 62 and the one or morehorizontal support members 64 can demarcate one or more cut-out regions74 in the electrode carrier plate 60. For example, the electrode carrierplate 60 can be substantially disc shaped and each of the one or morecut-out regions 74 in the electrode carrier plate 60 can besubstantially pie shaped. Accordingly, the central orifice 72 can be asubstantially cylindrical orifice formed near the center of theelectrode carrier plate 60. The annular electrode contacting ridge 66can form at least a portion of the central orifice and be concentricwith the central orifice 72. Moreover, each arcuate electrode contactingridge 70 can be concentric with the central orifice 72.

Referring again to FIG. 2, the cleaning assembly 100 further comprisesan acid injection inlet 120 for supplying an acidic solution to theshowerhead electrode 110. The acid injection inlet 120 can be coupled tothe high pressure closure member 20 and in fluid communication with thefirst cleaning volume 22 of the high pressure closure member 20.Accordingly, the acid injection inlet 120 can be operable to supply anacidic solution to the first cleaning volume 22 of the high pressureclosure member 20.

Referring now to FIG. 4, an embodiment of the modular electrode sealinghousing 10 is schematically depicted. In the depicted embodiment, theacid injection inlet 120 can be in fluid communication with an acidsupply assembly 122. The acid supply assembly 122 can include an acidsupply 124 that is operably connected to a pump 126. The pump 126 isconfigured to deliver the acidic solution from the acid supply 124 tothe acid injection inlet 120. The acid supply 124 can include one ormore vessels for storing acidic solutions. According to the embodimentsdescribed herein, the acidic solution can comprise nitric acid,hydrofluoric acid, acetic acid, or combinations thereof. In oneembodiment, the acidic solution is a mixed acid solution comprisingnitric acid, hydrofluoric acid, and acetic acid. In a furtherembodiment, the mixed acid solution can comprise a volume ratio of about6 units of nitric acid to about 1 unit of hydrofluoric acid to about 1unit of acetic acid (i.e., a volume ratio of about 6 to about 1 to about1). In still a further embodiment, the mixed acid solution can comprisewater a weight percent of greater than about 20%, such as, for examplegreater than or equal to about 30% in one embodiment.

The acid supply assembly 122 can further include a solenoid valve 128configured to selectively open and close such that the acidic solutioncan be selectively delivered to the modular electrode sealing housing10. The acid supply assembly 122 can further include a check valve 130that is configured to allow fluid flow towards the modular electrodesealing housing 10 and substantially prevent fluid flow from thecleaning assembly 100. It is noted that the phrase “solenoid valve” asus used herein means an electromechanical valve that can be controlledby an electrical signal supplied via, for example, a controller.

Referring again to FIG. 2, the modular electrode sealing housing 10further comprises a fluid injection inlet 132 for supplying purifiedwater to the showerhead electrode 110. The fluid injection inlet 132 canbe coupled to the low pressure closure member 40 and in fluidcommunication with the second cleaning volume 42 of the low pressureclosure member 40. Accordingly, the fluid injection inlet 132 can beoperable to supply purified water to the second cleaning volume 42 ofthe low pressure closure member 40.

Referring again to FIG. 4, the fluid injection inlet 132 can be in fluidcommunication with a water supply assembly 134. The water supplyassembly 134 can include a water supply 136 that is operably connectedto a pump 138. The pump 138 is configured to deliver purified water fromthe water supply 136 to the fluid injection inlet 132. The water supply136 can be any system or device suitable to store or deliver asufficient quantity of purified water such as, for example, storage tankor a water purification system. In some embodiments, the purified watercan be deionized water (DIW), which is water that has had mineral ionsremoved such as, but not limited to, cations from sodium, calcium, iron,copper and anions such as chloride and bromide. The water supplyassembly 134 can further include a solenoid valve 140 configured toselectively open and close such that the purified water can beselectively delivered to the second cleaning volume 42 of the lowpressure closure member 40 (FIG. 2).

Referring collectively to FIGS. 2 and 5, the fluid injection inlet 132can be in fluid communication with a conoidal spray member 142 fordirecting the flow of purified water in the second cleaning volume 42.For example, the conoidal spray member 142 can be configured to generatea spray that covers a relatively large area with respect to the surfaceare of the conoidal spray member 142 exposed to the second cleaningvolume 42. In one embodiment, the conoidal spray member 142substantially cone shaped member 144 that has a base 145 that isrelatively large compared to a peak 146 of the cone shaped member 144.The cone shaped member 144 can taper from the base 145 towards the peak146. The conoidal spray member 142 can further include a plurality ofapertures 148 arranged in a plurality of concentric rings. Theconcentric rings can be centered with the peak 146 of the cone shapedmember 144. In some embodiments, the number of the plurality ofapertures 148 in each ring increases as the distance away from the peakincreases, i.e., a ring nearer the base 145 can have a larger quantityof the plurality of apertures 148 than a ring nearer the peak 146.

Referring again to FIG. 2, the cleaning assembly 100 can furthercomprise a gas injection inlet 150 for supplying air to the showerheadelectrode 110. Specifically, the gas injection inlet 150 can be formedin the high pressure closure member 20 and in fluid communication withthe first cleaning volume 22 of the high pressure closure member 20. Inone embodiment, the gas injection inlet 150 can supply clean dry air tothe first cleaning volume 22 of the high pressure closure member 20.

Referring again to FIG. 4, the gas injection inlet 150 can be in fluidcommunication with a gas supply assembly 154. The gas supply assembly154 can include a gas supply 156 that is in fluid communication with asolenoid valve 158. The gas supply 156 can include one or more vesselsand/or a device for providing pressurized gas. The solenoid valve 158 isconfigured to selectively open and close such that the gas (e.g., air orCDA) can be selectively delivered to the first cleaning volume 22 of thehigh pressure closure member 20 (FIG. 2). The gas supply assembly 154can further include a check valve 130 that is configured to allow fluidflow towards the modular electrode sealing housing 10 and substantiallyprevent fluid flow from the modular electrode sealing housing 10.

Referring collectively to FIGS. 2, 6A and 6B, the gas injection inlet150 can be in fluid communication with a gas dispersion member 152 fordirecting the flow of gas in the first cleaning volume 22. For example,the gas dispersion member 152 can be configured to diffuse a pressurizedgas into the first cleaning volume 22 such that the pressurized gas isindirectly fed to the showerhead electrode 110. In one embodiment, thegas dispersion member 152 comprises a chamfered body 155 that hassubstantially chamfered cylindrical shape or a substantiallytrapezoidally shaped cross-section. Accordingly, the chamfered body 155can comprise a first perimeter 157 that is relatively small compared toa second perimeter 159. The chamfer body can taper inwards the secondperimeter 159 towards the first perimeter 157. The gas dispersion member152 can further include a plurality of gas outlets 160 in fluidcommunication with a central flow path 162. The plurality of gas outlets160 are conduits formed through the chamfered body 155 of the gasdispersion member 152 and arranged in a plurality of concentric rings.The concentric rings can be centered with the center line 164 of thecentral flow path 162. In some embodiments, each of the plurality of gasoutlets 160 is a substantially linear conduit that is oriented at anacute angle α with respect to the center line 164 of the central flowpath 162. In one embodiment, the acute angle α is from about 25° (about0.44 radians) to about 50° (about 0.87 radians).

Referring again to FIG. 2, the modular electrode sealing housing 10 canfurther comprise a second fluid injection inlet 166 for supplyingpurified water to the showerhead electrode 110. Specifically, the secondfluid injection inlet 166 can be formed in the high pressure closuremember 20 and in fluid communication with the first cleaning volume 22of the high pressure closure member 20. In one embodiment, the secondfluid injection inlet 166 can supply deionized water to the firstcleaning volume 22 of the high pressure closure member 20.

Referring again to FIG. 4, the second fluid injection inlet 166 can bein fluid communication with the water supply assembly 134. The watersupply assembly 134 can further include a solenoid valve 165 that is influid communication with the pump 138 The solenoid valve 165 isconfigured to selectively open and close such that the purified watercan be selectively delivered to the first cleaning volume 22 of the highpressure closure member 20 (FIG. 2). It is noted that, while the watersupply assembly 134 is depicted in FIG. 4 as supplying purified water tothe fluid injection inlet 132 and the second fluid injection inlet 166,each of the fluid injection inlet 132 and the second fluid injectioninlet 166 can have their own independent source of water.

Referring collectively to FIGS. 2, 7A and 7B, the second fluid injectioninlet 166 can be in fluid communication with a liquid dispersion member168 for directing the flow of liquid in the first cleaning volume 22.For example, the liquid dispersion member 168 can be configured todiffuse liquid into the first cleaning volume 22 such that the liquid isindirectly fed to the showerhead electrode 110. In one embodiment, theliquid dispersion member 168 comprises a cylindrical body 170 that has asubstantially cylindrical shape. The liquid dispersion member 168 canfurther include a plurality of liquid outlets 172 in fluid communicationwith a central flow path 174. The plurality of liquid outlets 172 areconduits formed through the cylindrical body 170 of the liquiddispersion member 168. Each of the plurality of liquid outlets 172 canbe a substantially linear conduit that travels radially outward from thecentral flow path 174 of the liquid dispersion member 168. In someembodiments, each of the plurality of gas outlets 160 is a substantiallylinear conduit that is oriented at a flat angle β with respect to thecenter line 176 of the central flow path 174. The flat angle β can beany angle with a substantial radial component such as, for example, fromabout 75° (about 1.31 radians) to about 105° (about 1.83 radians).

Referring again to FIG. 4, the cleaning assembly 100 can furthercomprise a pressure exhaust 178 coupled to the high pressure closuremember 20 and in fluid communication with the first cleaning volume 22of the high pressure closure member 20. The pressure exhaust 178 can bein fluid communication with a storage vessel 180 for containing anyfluids that are released vie the pressure exhaust 178. The pressureexhaust 178 can be a valve configured to release pressure from the firstcleaning volume 22. The pressure exhaust 178 can be opened once athreshold pressure has been achieved in the first cleaning volume 22(e.g., a pressure relief valve), or the pressure exhaust 178 can beopened via an electrical signal (e.g., a solenoid valve). In someembodiments, the pressure exhaust 178 may include both a pressure reliefvalve and a solenoid valve. In further embodiments, the outlet passage50 of the low pressure closure member 40 (FIG. 2) can be in fluidcommunication with a solenoid valve 183. The solenoid valve 183 can bein fluid communication with the storage vessel 180. The solenoid valve183 is configured to selectively open and close such that fluid can beselectively removed from the second cleaning volume 42 of the lowpressure closure member 40 (FIG. 2) and delivered to the storage vessel180.

Referring again to FIG. 1, the cleaning assembly 100 can comprise avertical actuator 182 for applying force to the modular electrodesealing housing 10 substantially along the Y-axis. Specifically, thevertical actuator 182 comprises a translation member 184 that is coupledto a mounting member 186. The mounting member 186 can be coupled to highpressure closure member 20 of the modular electrode sealing housing 10.The vertical actuator 182 can be operable to transition the highpressure closure member 20 between a closed position (FIG. 1) and anopen position (FIG. 8). In some embodiments, the vertical actuator 182is configured to translate the modular electrode sealing housing 10, andnot to provide any clamping pressure to the modular electrode sealinghousing 10. Alternatively or additionally, the vertical actuator 182 canbe configured to providing clamping pressure to seal the modularelectrode sealing housing 10 in the closed position. For example, thevertical actuator 182 can displace the high pressure closure member 20and compress O-rings 188 (FIG. 2). It is noted that, while the verticalactuator 182 is depicted as being operable to translate the highpressure closure member 20, the vertical actuator 182 can be operable tocause any type of relative translation between the high pressure closuremember 20 and the low pressure closure member 40 such as, but notlimited to, translating the low pressure closure member 40. As usedherein, the term “actuator” means a servomechanism that supplies andtransmits a measured amount of energy for the operation of anothermechanism such as, for example, a pneumatic servomechanism, anelectrical servomechanism, and the like.

Referring now to FIG. 9A, an alternative embodiment for providingclamping pressure to seal the modular electrode sealing housing 10 isdepicted. In some embodiments, the cleaning assembly 100 can comprise afirst horizontal actuator 190 and a second horizontal actuator 192 thattranslate substantially along the X-axis to seal the modular electrodesealing housing 10. The first horizontal actuator 190 is coupled to afirst clamping fork 194 such that the first horizontal actuator 190 isoperable to move the first clamping fork 194 substantially along theX-axis. The second horizontal actuator 192 is coupled to a secondclamping fork 196 such that the second horizontal actuator 192 isoperable to move the second clamping fork 196 along the X-axis. Thefirst horizontal actuator 190 and the second horizontal actuator 192 cancooperate to translate the first clamping fork 194 and the secondclamping fork 196 from a closed position (FIG. 9A) to an open position(FIG. 9B) and from the open position to the closed position.Accordingly, the first clamping fork 194 and the second clamping fork196 may selectively apply clamping force to the modular electrodesealing housing 10.

The sealable chamber 102 can be coupled to the first horizontal actuator190 and the second horizontal actuator 192. In some embodiments, asupport bracket 198 can be utilized to couple the first horizontalactuator 190 to the sealable chamber 102. Similarly, a support bracket198 (not visible in FIG. 9A) can be utilized to couple the secondhorizontal actuator 192 to the sealable chamber 102. In someembodiments, a left guide block 200 and a right guide block 202 can beprovided to support and align the first horizontal actuator 190 and thesecond horizontal actuator 192 along one or more X-Z planes.

Referring now to FIG. 10, the first clamping fork 194 can be contouredin a complimentary shape with respect to the modular electrode sealinghousing 10. In one embodiment, the first clamping fork 194 is contouredto receive a flange member 204 of the high pressure closure member 20and apply increasing clamping force upon the modular electrode sealinghousing 10 as the first clamping fork 194 is moved from an initialcontact position 206 to an inward position 208 with respect to theflange member 204 of the high pressure closure member 20. Specifically,the first clamping fork 194 can comprise a flange engaging surface 210is canted such that when the first clamping fork 194 makes initialcontact with the high pressure closure member 20, the initial contactposition 206, flange engaging surface 210 is oriented at an engagementangle θ with respect to the flange member 204. In some embodiments, theengagement angle θ is less than about 45° (about 0.79 radians), such as,for example, about 20° (about 0.35 radians) in one embodiment.Additionally, the second clamping fork 196 can be contoured to receive aflange member 204 is a manner substantially equivalent to the firstclamping fork 194, as is described above. It is noted that, while twoclamping forks are depicted in FIGS. 9A and 9B, any number of clampingforks can be utilized such that substantially uniform clamping force isapplied across the flange member 204 of the high pressure closure member20.

Referring collectively to FIGS. 1 and 8, the cleaning assembly 100 cancomprise one or more positional sensors 212 configured to detect therelative positioning of the high pressure closure member 20 and the lowpressure closure member 40 of the modular electrode sealing housing 10with respect to one another. In one embodiment, the one or morepositional sensors 212 can be configured to detect the position of thehigh pressure closure member 20 substantially along the Y-axis. Theposition of the high pressure closure member 20 can be correlated,automatically with the processor 185 (FIG. 4), to the amount of clampingforce that is applied to urge the high pressure closure member 20 andthe low pressure closure member 40 of the modular electrode sealinghousing 10 together. It is noted that the term “sensor,” as used herein,means a device that measures a physical quantity and converts it into adata signal, which is correlated to the measured value of the physicalquantity, such as, for example, an electrical signal, an electromagneticsignal, an optical signal, a mechanical signal, or the like.Accordingly, the one or more positional sensors 212 can include opticalsensors such as, for example, fork light barriers or trough beamsensors, or any other sensor capable to detecting relative positioningof the high pressure closure member 20 and the low pressure closuremember 40 of the modular electrode sealing housing 10.

According to the embodiments described herein, each of the solenoidvalve 140, solenoid valve 158, solenoid valve 165, pressure exhaust 178,and solenoid valve 183 can be communicatively coupled to one or moreprocessors 185 (generally indicated in FIG. 4 as dashed arrows).Accordingly, operation of the cleaning assembly 100 can be automaticallycontrolled by the execution of machine readable instructions by the oneor more processors 185. As used herein, the term “communicativelycoupled” means that the components are capable of exchanging datasignals with one another such as, for example, electrical signals viaconductive medium, electromagnetic signals via air, optical signals viaoptical waveguides, and the like.

The processor 185 can be any device capable of executing machinereadable instructions. Accordingly, the processor 185 may be acontroller, an integrated circuit, a microchip, a computer, or any othercomputing device. Moreover, the processor can be communicatively coupledto a memory such as, for example, RAM, ROM, a flash memory, a harddrive, or any device capable of storing machine readable instructions.

As is explained in further detail herein, the processor 185 can causeany process to be performed automatically by executing machine readableinstructions or an algorithm written in any programming language of anygeneration (e.g., 1GL, 2GL, 3GL, 4GL, or 5GL) such as, e.g., machinelanguage that may be directly executed by the processor, or assemblylanguage, object-oriented programming (OOP), scripting languages,microcode, etc., that may be compiled or assembled into machine readableinstructions and stored on a machine readable medium. Alternatively, thelogic or algorithm may be written in a hardware description language(HDL), such as logic implemented via either a field-programmable gatearray (FPGA) configuration or an application-specific integrated circuit(ASIC), and their equivalents. Accordingly, the logic may be implementedin any conventional computer programming language, as pre-programmedhardware elements, or as a combination of hardware and softwarecomponents.

Referring again to FIG. 2, the modular electrode sealing housing 10 canbe disposed within the sealable chamber 102 such that the modularelectrode sealing housing 10 is exposed to the ambient conditions withinthe interior volume 104. As is noted above, the interior volume 104 canbe supplied with clean air via the air inlet 106 and evacuated ofby-products of the modular electrode sealing housing 10 via the airoutlet 108.

The modular electrode sealing housing 10 can comprise a high pressureclosure member 20, a low pressure closure member 40, and an electrodecarrier plate 60 that are sealed to a showerhead electrode 110 viamultiple o-rings 188. Specifically, the high pressure closure member 20can be sealed to a first side 112 of the showerhead electrode with ano-ring 188. Together the high pressure closure member 20 and the firstside 112 of the showerhead electrode 110 can define a first cleaningvolume 22. The high pressure closure member 20 can contain a firstcleaning volume 22 one the first side 112 of the showerhead electrode110. The low pressure closure member 40 can be sealed to the electrodecarrier plate 60 with an o-ring 188. The electrode carrier plate 60 canbe sealed to a second side 114 of the showerhead electrode 110 with ano-ring 188. Together the low pressure closure member 40, the electrodecarrier plate 60, and the second side 114 of the showerhead electrode110 can define a second cleaning volume 42. The low pressure closuremember 40 can contain the second cleaning volume 42 on the second side114 of the showerhead electrode 110.

The modular electrode sealing housing 10 can optionally comprise a fluiddiffuser 90 for diffusing fluid supplied to the first cleaning volume22. For example, the fluid diffuser 90 can be coupled to the overlapdefining wall 34 of the high pressure closure member 20 such that thefluid diffuser 90 demarcates the first section 26 of the first cleaningvolume 22 and the second section 28 of the first cleaning volume 22. Thefluid diffuser can comprise a turbulent facing surface 92 exposed to thefirst section 26 of the first cleaning volume 22, an isostatic facingsurface 94 exposed to the second section 28 of the first cleaning volume22 and a plurality of diffusing flow-paths 96 between the turbulentfacing surface 92 and the isostatic facing surface 94. Thus, pressurizedfluid introduced to the first section 26 of the first cleaning volume 22flows through the diffusing flow-paths 96 and into the second section 28of the first cleaning volume 22.

In one embodiment, an acid injection inlet 120, a gas injection inlet150, and a second fluid injection inlet 166 can be formed though thedepth defining wall 24 of the high pressure closure member 20. The gasinjection inlet 150 can be in fluid communication with a gas dispersionmember 152 for supplying purified air to the first cleaning volume 22.The second fluid injection inlet 166 can be in fluid communication witha liquid dispersion member 168 for supplying purified water to the firstcleaning volume 22.

In some embodiments, the acid injection inlet 120, the gas outlets 160of the gas dispersion member 152, and the liquid outlets 172 of theliquid dispersion member 168 can be out of alignment with each of theplurality of diffusing flow-paths 96 of the fluid diffuser 90.Specifically, the acid injection inlet 120 can be out of directalignment with each of the plurality of diffusing flow-paths 96.Accordingly, substantially all of an acidic solution supplied via theacid injection inlet 120 redirected within the first section 26 of thefirst cleaning volume 22 before traveling through the plurality ofdiffusing flow-paths 96. The gas outlets 160 of the gas dispersionmember 152 can be directed towards the depth defining wall 24 of thehigh pressure closure member 20. Accordingly, substantially all of apressurized gas supplied via the gas dispersion member 152 can beredirected within the first section 26 of the first cleaning volume 22by the depth defining wall 24 before traveling through the plurality ofdiffusing flow-paths 96. The liquid outlets 172 of the liquid dispersionmember 168 can be directed towards the first outer wall 30 of the highpressure closure member 20. Accordingly, substantially all of thepurified water supplied via the liquid dispersion member 168 can beredirected within the first section 26 of the first cleaning volume 22by the first outer wall 30 before traveling through the plurality ofdiffusing flow-paths 96. Therefore, without being bound to anyparticular theory, it is believed that any of the acidic solution,pressurized gas, and purified water exits the second section 28 of thefirst cleaning volume 22 contained by the high pressure closure member20 in a substantially isostatic manner. Specifically, it is believedthat a substantially constant pressure is applied to the first side 112of the showerhead electrode 110 substantially along an X-Z plane.

Referring collectively to FIGS. 2 and 3, the low pressure closure member40 and the electrode carrier plate 60 can cooperate to support theshowerhead electrode 110. In one embodiment, the upper support surface52 of the low pressure closure member 40 can be engaged with theunderside 78 of the electrode carrier plate 60. Specifically, theperipheral electrode contacting portion 62 of the electrode carrierplate 60 can be aligned with and supported substantially along theY-axis by the peripheral support region 44 of the low pressure closuremember 40. The horizontal support members 64 of the electrode carrierplate 60 can be aligned with and supported substantially along theY-axis by the protruding support members 48 of the low pressure closuremember 40.

The low pressure closure member 40 can further comprise an outeralignment rim 54 that substantially surrounds the peripheral supportregion 44. The outer alignment rim 54 can project away from theperipheral support region 44 substantially in the negative Y-direction.The outer alignment rim 54 of the low pressure closure member 40 can beconfigured to accept the electrode carrier plate 60. Accordingly, whenthe upper support surface 52 of the low pressure closure member 40 canbe engaged with the underside 78 of the electrode carrier plate 60, theouter alignment rim 54 limits the lateral movement (e.g., movement aboutthe X-Z plane) of the electrode carrier plate 60. In some embodiments,the electrode carrier plate 60 can comprise one or more handles 82 andthe outer alignment rim 54 may include cutout regions 58 for receivingthe one or more handles 82.

The electrode carrier plate 60 can be engaged with the second side 114of the showerhead electrode 110 such that substantially all of the gaspassages 116 are uncovered. Specifically, the portions of the secondside 114 of the showerhead electrode 110 adjacent to the gas passages116 can be in contact with the annular electrode contacting ridge 66 andthe arcuate electrode contacting ridges 70 of the electrode carrierplate 60. The outer portion 118 of the showerhead electrode 110 can bein contact with the peripheral electrode contacting portion 62 of theelectrode carrier plate 60. The gas passages 116 of the showerheadelectrode 110 can be aligned with the cut-out regions 74 of theelectrode carrier plate 60 and the relief formed by the one or morehorizontal support members 64 and the arcuate electrode contactingridges 70 of the electrode carrier plate 60. Accordingly, the electrodecarrier plate 60 can support the showerhead electrode 110 substantiallyalong the Y-axis without stopping fluids from flowing through the gaspassages 116 from the first side 112 to the second side 114 of theshowerhead electrode 110.

The electrode carrier plate 60 can further comprise an electrodealignment rim 80 that substantially surrounds the peripheral electrodecontacting portion 62. The electrode alignment rim 80 can project awayfrom the support surface 68 substantially in the negative Y-direction.The electrode alignment rim 80 of the electrode carrier plate 60 can beconfigured to align the showerhead electrode with the modular electrodesealing housing 10. Accordingly, when the support surface 68 ofelectrode carrier plate 60 is engaged with the second side 114 of theshowerhead electrode 110, the electrode alignment rim 80 limits thelateral movement (e.g., movement about the X-Z plane) of the showerheadelectrode 110.

Moreover, when engaged with one another, the low pressure closure member40, electrode carrier plate 60 and the showerhead electrode 110 candemarcate the second cleaning volume 42 on the second side 114 of theshowerhead electrode 110. In the depicted embodiment, the low pressureclosure member 40 can contain the lowest portion (portion furthest alongthe positive Y-direction) of the second cleaning volume 42. As is notedabove, one or more conoidal spray members 142 can be in fluidcommunication with a second fluid injection inlet 166 formed through thefluid collecting surface 46 of the low pressure closure member 40. Eachof the one or more conoidal spray members 142 can be aligned withcut-out regions 74 of the electrode carrier plate 60 substantially alongthe Y-axis. Accordingly, purified water can be injected through thesecond cleaning volume 42 and into contact with the second side 114 ofthe showerhead electrode 110.

In order that the embodiments described herein may be more readilyunderstood, reference is made to the following example, which isintended to illustrate the embodiments described herein, but not limitthe scope thereof.

A method 220 for determining a predetermined path is depicted in FIG.11. Each process of the method 220 can be performed automatically withthe one or more processors 185 (FIG. 4). Specifically, it is noted thatwhile the processes are described as being performed according to aspecific sequence, it is noted that each of the processes describedherein can be performed in any order. Moreover, multiple processes canbe performed simultaneously and/or eliminated.

Referring collectively to FIGS. 2 and 11, a showerhead electrode 110 canbe sealed within a cleaning assembly 100, as is described hereinabove.Generally, the showerhead electrode 110 comprises a plurality of gaspassages 116 that extend through the showerhead electrode 110 from thefirst side 112 of the showerhead electrode 110 to the second side 114 ofthe showerhead electrode 110. At process 222, a quantity of purifiedwater can be propelled through the first cleaning volume 22 on the firstside 112 of the showerhead electrode 110 and into contact with the firstside 112 of the showerhead electrode 110. Accordingly, the purifiedwater can be forced to travel through the plurality of gas passages 116of the showerhead electrode 110. For example, purified water can beinjected into the first cleaning volume 22 by the liquid dispersionmember 168. In some embodiments, it may be desirable to perform process222 as an initial purge before an acidic solution is loaded into thefirst cleaning volume 22. Accordingly, the first cleaning volume 22, andthe second cleaning volume 42 can be purged with purified water for aperiod of time such as, for example, about 5 seconds prior to cleaningthe showerhead electrode 110.

At process 224, an amount of air can be injected injecting into thefirst cleaning volume 22 on the first side 112 of the showerheadelectrode 110. For example, the gas dispersion member 152 can supplypressurized air to the first cleaning volume 22 such that the pressurein the first cleaning volume 22 is relatively high compared to thepressure of the second cleaning volume 42. Accordingly, any purifiedwater in the first cleaning volume 22 and the gas passages 116 of theshowerhead electrode 110 can be forced into the second cleaning volume42. The purified water can then be collected by the fluid collectingsurface 46 of the low pressure closure member 40 and drained from thecleaning assembly 100 via the outlet passage 50. For example, when theY-axis is substantially aligned with gravity, the purified water can bedrained via the outlet passage under the urging of gravity. In someembodiments, it may be desirable to perform process 224 after process222 to dry the showerhead electrode 110 before the acidic solution isloaded into the first cleaning volume 22.

At process 226, the acidic solution can be loaded into the firstcleaning volume 22 on the first side 112 of the showerhead electrode110. For example, the acid injection inlet 120 can supply the acidicsolution to the first cleaning volume 22. It is noted that because theacidic solution is generally pumped (e.g., via the pump 126 depicted inFIG. 4) the pressure in the first cleaning volume 22 can relatively highcompared to the pressure of the second cleaning volume 42. Moreover, achemical reaction between the acidic solution and the showerheadelectrode 110 can occur during process 226. The chemical reaction can beexothermic and produce gases, which can also increase the pressure inthe first cleaning volume 22. Accordingly, the first cleaning volume 22can be vented, while the acidic solution is loaded. Specifically, thepressure exhaust 178 can be opened automatically, i.e., either upondirection of the one or more processors 185 (FIG. 4) or due to an overpressure actuation.

At process 228, after the first cleaning volume has been supplied withthe acidic solution, the first cleaning volume 22 can be pressurizedsuch that at least a portion of the acidic solution flows through one ormore of the plurality of gas passages 116 of the showerhead electrode110. In one embodiment, the gas dispersion member 152 can supplypressurized air to the first cleaning volume 22 such that the pressurein the first cleaning volume 22 is relatively high compared to thepressure of the second cleaning volume 42. Accordingly, acidic solutionin the first cleaning volume 22 can be urged through the gas passages116 of the showerhead electrode 110 and forced into the second cleaningvolume 42. In some embodiments, the flow of substantially all of theacidic solution can take about 5 seconds.

At process 230, pressurized air can be supplied to the first cleaningvolume 22 to dry the showerhead electrode 110. For example, the gasdispersion member 152 can continue to inject air into the first cleaningvolume 22 after the flow of the acidic solution has subsided, in orderto ensure that the showerhead electrode 110 is dry. In some embodiments,the showerhead electrode 110 can be dried for about twice as long as theacidic solution is forced to flow in process 228.

At process 232, a quantity of purified water can be propelled throughthe first cleaning volume 22 and into contact with the first side 112 ofthe showerhead electrode 110. Accordingly, the purified water can beforced to travel through the plurality of gas passages 116 of theshowerhead electrode 110. For example, the quantity of purified watercan be injected into the first cleaning volume 22 by the liquiddispersion member 168. In some embodiments, the quantity of purifiedwater can be supplied continuously for about 5 seconds.

At process 234, an amount of purified water can be propelled through thesecond cleaning volume 42 on the second side 114 of the showerheadelectrode 110, and into contact with the second side 114 of theshowerhead electrode 110. For example, the purified water can bepropelled towards the second side 114 of the showerhead electrode 110 bythe conoidal spray members 142. In some embodiments, the conoidal spraymembers 142 can supply purified water to the showerhead electrode 110for about 5 seconds.

At process 236, a second quantity of purified water can be propelledthrough the first cleaning volume 22 and into contact with the firstside 112 of the showerhead electrode 110. For example, the quantity ofpurified water can be injected into the first cleaning volume 22 by theliquid dispersion member 168 after the conoidal spray members 142 hassupplied the purified water that contacts the second side 114 of theshowerhead electrode 110.

At process 238, an amount of air can be injected into the first cleaningvolume 22. In one embodiment, after the first side 112 of the showerheadelectrode 110 has been rinsed with purified water twice and the secondside has been rinsed with purified water, the gas dispersion member 152can supply pressurized air to the first cleaning volume 22 such that thepressure in the first cleaning volume 22 is relatively high compared tothe pressure of the second cleaning volume 42. Accordingly, any purifiedwater in the first cleaning volume 22 and the gas passages 116 of theshowerhead electrode 110 can be forced into the second cleaning volume42.

The method 220 can be automated utilizing the cleaning assembly 100depicted in FIG. 4. For example, the one or more processors 185 canexecute machine readable instructions to open and close the varioussolenoid valves as shown below in Table 1 during each of the abovedescribed processes.

TABLE 1 Solenoid Solenoid Solenoid Solenoid Pressure Solenoid valve 128valve 165 valve 183 valve 158 exhaust 178 Valve 140 Process 222 ClosedClosed Open Closed Closed Closed Process 224 Closed Open Open OpenClosed Closed Process 226 Open Closed Closed Closed Open Closed Process228 Closed Closed Open Open Closed Closed Process 230 Closed Closed OpenOpen Closed Closed Process 232 Closed Open Open Closed Closed ClosedProcess 234 Closed Closed Open Closed Closed Open Process 236 ClosedOpen Open Closed Closed Closed Process 238 Closed Closed Open OpenClosed Closed

For the purposes of describing and defining the present invention it isnoted that the terms “substantially” and “about” are utilized herein torepresent the inherent degree of uncertainty that may be attributed toany quantitative comparison, value, measurement, or otherrepresentation. The terms “substantially” and “about” are also utilizedherein to represent the degree by which a quantitative representationmay vary from a stated reference without resulting in a change in thebasic function of the subject matter at issue.

It is noted that the term “commonly,” when utilized herein, is notutilized to limit the scope of the claimed invention or to imply thatcertain features are critical, essential, or even important to thestructure or function of the claimed invention. Rather, these terms aremerely intended to identify particular aspects of an embodiment of thepresent disclosure or to emphasize alternative or additional featuresthat may or may not be utilized in a particular embodiment of thepresent disclosure. Similarly, although some aspects of the presentdisclosure are identified herein as preferred or particularlyadvantageous, it is contemplated that the present disclosure is notnecessarily limited to these preferred aspects of the invention.

Furthermore, it is noted that directional references such as, forexample, flow path, X-direction, Y-direction, X-axis, Y-axis, X-Z planeand the like have been provided for clarity and without limitation.Specifically, it is noted such directional references are made withrespect to the coordinate systems depicted in FIGS. 1-10. Thus, thedirections may be reversed or oriented in any direction by makingcorresponding changes to the provided coordinate system with respect tothe structure to extend the examples described herein.

Having described the invention in detail and by reference to specificembodiments thereof, it will be apparent that modifications andvariations are possible without departing from the scope of theinvention defined in the appended claims.

It is noted that one or more of the following claims utilize the term“wherein” as a transitional phrase. For the purposes of defining thepresent invention, it is noted that this term is introduced in theclaims as an open-ended transitional phrase that is used to introduce arecitation of a series of characteristics of the structure and should beinterpreted in like manner as the more commonly used open-ended preambleterm “comprising.”

What is claimed is:
 1. A method for cleaning a showerhead electrode,comprising: sealing a showerhead electrode within a cleaning assemblysuch that a first cleaning volume is formed on a first side of theshowerhead electrode within a high pressure closure member sealed to theshowerhead electrode and a second cleaning volume is formed on a secondside of the showerhead electrode within a low pressure closure membersealed to the showerhead electrode, wherein the showerhead electrodecomprises a plurality of gas passages that extend through the showerheadelectrode from the first side of the showerhead electrode to the secondside of the showerhead electrode; loading an acidic solution into thefirst cleaning volume on the first side of the showerhead electrode;after the loading, pressurizing the first cleaning volume on the firstside of the showerhead electrode such that at least a portion of theacidic solution flows through one or more of the plurality of gaspassages of the showerhead electrode; and propelling an amount ofpurified water through a fluid injection inlet coupled to the lowpressure closure member and in fluid communication with the secondcleaning volume on the second side of the showerhead electrode, and intocontact with the second side of the showerhead electrode.
 2. The methodof claim 1, further comprising venting the first cleaning volume on thefirst side of the showerhead electrode, while the acidic solution isloaded.
 3. The method of claim 1, further comprising propelling aquantity of purified water through the first cleaning volume on thefirst side of the showerhead electrode and into contact with the firstside of the showerhead electrode before the amount of purified water ispropelled into contact with the second side of the showerhead electrode.4. The method of claim 3, further comprising propelling a secondquantity of purified water through the first cleaning volume on thefirst side of the showerhead electrode and into contact with the firstside of the showerhead electrode after the amount of purified watercontacts the second side of the showerhead electrode.
 5. The method ofclaim 4, injecting an amount of air into the first cleaning volume onthe first side of the showerhead electrode after the second quantity ofpurified water contacts the first side of the showerhead electrode,wherein at least a portion of the amount of air is forced through one ormore of the plurality of gas passages of the showerhead electrode. 6.The method of claim 3, wherein the quantity of purified water ispropelled by a liquid dispersion member comprising a cylindrical bodywith a central flow path formed therein, and a plurality of liquidoutlets formed in the cylindrical body, wherein each of the plurality ofliquid outlets is a substantially linear conduit that travels radiallyoutward from the central flow path.
 7. The method of claim 1, furthercomprising propelling a quantity of purified water through the firstcleaning volume on the first side of the showerhead electrode and intocontact with the first side of the showerhead electrode before theacidic solution is loaded into the first cleaning volume.
 8. The methodof claim 7, injecting an amount of air into the first cleaning volume onthe first side of the showerhead electrode after the quantity ofpurified water contacts the first side of the showerhead electrode andbefore the acidic solution is loaded into the first cleaning volume. 9.The method of claim 1, wherein the cleaning assembly is sealed to theshowerhead electrode via one or more O-rings, the low pressure closuremember further including a spray member in fluid communication with thefluid injection inlet which sprays the purified water in the secondcleaning volume, and the low pressure closure member including an outletpassage in fluid communication with the second cleaning volume throughwhich the purified water from the second cleaning volume is drainedduring cleaning of the showerhead electrode.
 10. The method of claim 9,wherein the high pressure closure member has a flange member and ahorizontal actuator coupled to a clamping fork that is contoured toreceive the flange member of the high pressure closure member, andwherein the horizontal actuator translates the clamping fork laterallyinto contact with the flange member to provide a clamping pressure tocompress the one or more O-rings.
 11. The method of claim 9, wherein thecleaning assembly comprises a vertical actuator provides a clampingpressure to compress the one or more O-rings.
 12. The method of claim 1,wherein the cleaning assembly comprises an outlet passage in fluidcommunication with the second cleaning volume on the second side of theshowerhead electrode, the method further comprising maintaining theoutlet passage closed while the acidic solution is loaded into the firstcleaning volume on the first side of the showerhead electrode andmaintaining the outlet passage open while the first cleaning volume onthe first side of the showerhead electrode is pressurized.
 13. Themethod of claim 1, wherein the cleaning assembly comprises a pluralityof arcuate electrode contacting ridges that are in contact with thesecond side of the showerhead electrode such that the plurality of gaspassages of the showerhead electrode are unobstructed.
 14. The method ofclaim 1, wherein the acidic solution comprises nitric acid.
 15. Themethod of claim 1, wherein the acidic solution comprises hydrofluoricacid.
 16. The method of claim 1, wherein the acidic solution comprisesacetic acid.
 17. The method of claim 1, wherein the acidic solution is amixed acid solution comprising nitric acid, hydrofluoric acid, andacetic acid at a volume ratio of about 6 to about 1 to about
 1. 18. Themethod of claim 1, wherein the first cleaning volume on the first sideof the showerhead electrode is pressurized with a gas supplied with agas dispersion member comprising a chamfered body having a substantiallytrapezoidally shaped cross-section and a plurality of gas outlets formedin the chamfered body.
 19. The method of claim 1, wherein the amount ofpurified water is propelled through the second cleaning volume on thesecond side of the showerhead electrode with a conoidal spray membercomprising a cone shaped member having a base that tapers toward a peakof the cone shaped member, and a plurality of apertures formed throughthe cone shaped member and arranged in a plurality of concentric rings.20. A method for cleaning a showerhead electrode, comprising: sealing ashowerhead electrode within a cleaning assembly such that a firstcleaning volume is formed on a first side of the showerhead electrodewithin a high pressure closure member sealed to the showerhead electrodeand a second cleaning volume is formed on a second side of theshowerhead electrode within a low pressure closure member sealed to theshowerhead electrode, wherein the showerhead electrode comprises aplurality of gas passages that extend through the showerhead electrodefrom the first side of the showerhead electrode to the second side ofthe showerhead electrode; loading an acidic solution into the firstcleaning volume on the first side of the showerhead electrode; after theloading, pressurizing the first cleaning volume on the first side of theshowerhead electrode a gas supplied with a gas dispersion member, suchthat at least a portion of the acidic solution flows through one or moreof the plurality of gas passages of the showerhead electrode, whereinthe gas dispersion member comprises a chamfered body having asubstantially trapezoidally shaped cross-section and a plurality of gasoutlets formed in the chamfered body; propelling a quantity of purifiedwater through the first cleaning volume on the first side of theshowerhead electrode and into contact with the first side of theshowerhead electrode with a liquid dispersion member comprising acylindrical body with a central flow path formed therein, and aplurality of liquid outlets formed in the cylindrical body, wherein eachof the plurality of liquid outlets is a substantially linear conduitthat travels radially outward from the central flow path; and propellingan amount of purified water through a conoidal spray member coupled tothe low pressure closure member and in fluid communication with thesecond cleaning volume on the second side of the showerhead electrode,and into contact with the second side of the showerhead electrode, theconoidal spray member comprising a cone shaped member having a base thattapers toward a peak of the cone shaped member, and a plurality ofapertures formed through the cone shaped member and arranged in aplurality of concentric rings.